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发明名称
MULTI-POST STRUCTURES
摘要
Micromechanical devices having complex multilayer structures and techniques for forming the devices are described.
申请公布号
EP2025003(A4)
申请公布日期
2014.08.13
申请号
EP20070783798
申请日期
2007.05.15
申请人
FUJIFILM DIMATIX, INC.
发明人
BIRKMEYER, JEFFREY
分类号
H01L29/06
主分类号
H01L29/06
代理机构
代理人
主权项
地址
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