Bolometric detector of electromagnetic radiation in the terahertz range and matrix detection device comprising such detectors
摘要
<p>The device has a skimming circuit comprising a reflective metal layer formed on a substrate (52) opposite to a microbridge of the skimming circuit, where the microbridge is suspended above the substrate. A bias circuit is electrically connected to the microbridge of to electrically bias the bias circuit and generate an electric signal depending on electric resistance of a resistive bolometric element. A read circuit (84) is coupled to an elementary bolometric detector and the skimming circuit to measure difference between electric signals generated by the detector and the skimming circuit.</p>
申请公布号
EP2700922(B1)
申请公布日期
2014.08.13
申请号
EP20130178436
申请日期
2013.07.30
申请人
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES
发明人
OUVRIER-BUFFET, JEAN-LOUIS;MEILHAN, JÉRÔME;NGUYEN, DUY THONG;SIMOENS, FRANÇOIS