Optical waveguide device

摘要

An optical waveguide device that uses a thin substrate having an electro-optical effect and a thickness of 10 μm or less, in which slab propagation light that is reflected from an end face of the device is removed and thus deterioration in an operational characteristic is suppressed. The optical waveguide device includes: a thin substrate which has an electro-optical effect and thickness of 10 μm or less, and in which an optical waveguide is formed; and a supporting substrate that is adhered to the thin substrate through an adhesion layer. An antireflective film is formed on a part of a side surface of the optical waveguide device.

主权项

1. An optical waveguide device, comprising:
a thin substrate which has an electro-optical effect and a thickness of 10 μm or less, and in which an optical waveguide is formed; and a supporting substrate that is adhered to the thin substrate through an adhesion layer, wherein an antireflective film is formed on a part of a side surface of the optical waveguide device, and wherein the antireflective film is formed over both of the thin substrate and the supporting substrate.