| 发明名称 | Ultrasonic transducer, biological sensor, and method for manufacturing an ultrasonic transducer | ||
| 摘要 | An ultrasonic transducer includes a resin substrate, a support film and a piezoelectric element. The resin substrate has an opening. The support film blocks off the opening in the resin substrate. The piezoelectric element is disposed on the support film in a region that blocks off the opening in plan view from a thickness direction of the support film. The piezoelectric element includes a lamination of a lower electrode, a piezoelectric body, and an upper electrode. | ||
| 申请公布号 | US8803405(B2) | 申请公布日期 | 2014.08.12 |
| 申请号 | US201213479937 | 申请日期 | 2012.05.24 |
| 申请人 | Seiko Epson Corporation | 发明人 | Nakamura Tomoaki;Suzuki Hironori |
| 分类号 | H01L41/08 | 主分类号 | H01L41/08 |
| 代理机构 | Global IP Counselors, LLP | 代理人 | Global IP Counselors, LLP |
| 主权项 | 1. An ultrasonic transducer comprising: a resin substrate having an opening; a support film that blocks off the opening in the resin substrate; and a piezoelectric element disposed on the support film in a region that blocks off the opening in plan view from a thickness direction of the support film, the piezoelectric element including a lamination of a lower electrode, a piezoelectric body, and an upper electrode. | ||
| 地址 | Tokyo JP | ||