Non-wear shutter apparatus for a vapor deposition apparatus

摘要

An apparatus and associated method for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate includes a deposition head wherein a source material is sublimated. A distribution manifold is provided with a plurality of passages defined therethrough for passage of the sublimated source material to the substrate. A shutter plate is disposed above the distribution manifold and includes a plurality of passages therethrough that align with the passages in the distribution manifold in a first position of the shutter plate. The shutter plate is movable to a second position wherein the shutter plate blocks the passages in the distribution manifold to flow of sublimated material therethrough. A lifting mechanism is configured between the shutter plate and the distribution manifold to lift and move the shutter plate between the first and second positions without sliding the shutter plate on the distribution manifold.

主权项

1. An apparatus for vapor deposition of a sublimated source material as a thin film on a photovoltaic (PV) module substrate, said apparatus comprising:
a deposition head wherein a source material is sublimated; a distribution manifold comprising a plurality of passages defined therethrough for passage of the sublimated source material to a substrate; a shutter plate disposed above said distribution manifold, said shutter plate comprising a plurality of passages therethrough that align with said passages in said distribution manifold in a first position of said shutter plate in direct contact with said distribution manifold, said shutter plate movable to a second position in direct contact with said distribution manifold wherein said shutter plate blocks said passages in said distribution manifold to flow of sublimated material therethrough; and a lifting mechanism configured relative to said shutter plate and said distribution manifold to lift and move said shutter plate between said first and second positions without sliding said shutter plate on said distribution manifold.