Vertical meander inductor for small core voltage regulators

摘要

Vertical meander inductors for small core voltage regulators and approaches to fabricating vertical meander inductors for small core voltage regulators are described. For example, a semiconductor die includes a substrate. An integrated circuit is disposed on an active surface of the substrate. An inductor is coupled to the integrated circuit. The inductor is disposed conformal with an insulating layer disposed on an essentially planar surface of the substrate. The insulating layer has an undulating topography.

主权项

1. A semiconductor die, comprising:
a substrate; an integrated circuit disposed on an active front surface of the substrate; and an inductor coupled to the integrated circuit, the inductor disposed conformal with an insulating layer disposed on, but not through, an essentially planar back surface of the substrate, wherein an uppermost surface of the insulating layer has an undulating topography, and wherein both an uppermost surface and a lowermost surface of the inductor have the undulating topography.