Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus

摘要

A collector mirror exchanging apparatus capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.

主权项

1. A collector mirror exchanging apparatus to be used in an extreme ultraviolet light source apparatus for outputting extreme ultraviolet light by irradiating a target material in a chamber with a laser beam from outside of said chamber to generate plasma and collecting a predetermined wavelength component emitted from the plasma, said apparatus comprising:
a collector mirror supporting base disposed in said chamber and configured to support a collector mirror; and a carriage configured to mount said collector mirror outside said chamber, said carriage comprising a collector mirror rotating unit configured to rotate said collector mirror.