OPC conflict identification and edge priority system

摘要

An integrated circuit verification system provides an indication of conflicts between an OPC suggested correction and a manufacturing rule. The indication specifies which edge segments are in conflict so that a user may remove the conflict to achieve a better OPC result. In another embodiment of the invention, edge segments are assigned a priority such that the correction of a lower priority edge does not hinder a desired OPC correction of a higher priority edge.

主权项

1. A method of performing optical and process correction (OPC) on a circuit design comprising:
with a computer, determining a pair of edge segments in the design that will violate a manufacturing rule if one or both of the edge segments receives an OPC correction, thereby determining a conflict; and determining a third edge segment that can be moved to eliminate the conflict if one or both of the pair of edge segments receives the OPC correction, wherein the third edge segment is a different segment than the pair of edge segments.