Inter-digital bulk acoustic resonator

摘要

An inter-digital bulk acoustic resonator including a resonating structure, one or more input electrodes, one or more output electrodes, a substrate, and a supporting structure disposed on the substrate is provided. The resonating structure includes one or more resonating beams and a coupling beam. The resonating beams are connected at opposite two sides of the coupling beam respectively. The input electrodes and the output electrodes are arranged among the resonating beams in interlace. The input electrodes, the output electrodes, and the resonating beams are parallel to each other. Two ends of the coupling beam are connected to the supporting structure, such that the resonating structure is supported on the substrate.

主权项

1. An inter-digital bulk acoustic resonator, comprising:
a resonating structure, comprising one or more resonating beams and a coupling beam, wherein the resonating beams are respectively connected at two opposite sides of the coupling beam, and the resonating beams are perpendicular to the coupling beam; at least one input electrode and at least one output electrode, wherein the input electrode and the output electrode are arranged in interlace between the resonating beams, the input electrode is disposed at two sides of the coupling beam, and the output electrode is disposed at two sides of the coupling beam, the input electrode, the output electrode and the resonating beams are disposed in parallel to each other, and the input electrode or the output electrode and two adjacent resonating beams respectively form a capacitor space, such that the input electrode drives the two adjacent resonating beams to vibrate or the output electrode senses a capacitance variation generated due to vibration of the two adjacent resonating beams; a substrate; and a supporting structure, disposed on the substrate, wherein the coupling beam or the resonating structure is supported on the substrate.