| 摘要 |
<p>The present invention provides an RF testing method and a system thereof in which a DC measuring path can be operated as an RF path which is suitably terminated. For this, an output of HI, LO, and sense HI conductors is terminated with a frequency selective manner. It is required that the termination does not effect on the SMU DC measurement. To remove reflection, termination is suitably executed and a high speed device is not oscillated during a device test any more as long as one device maintains a high separation with another device (a separate device is used for a gate and a drain or an input and an output of the device) when all SMU input/output impedance is controlled. An output of the HI, LO, and sense HI conductors is connected to various nodes of a device (DUT) to be tested under test through three triaxial cables. Outer shielding of the triaxial cables is connected each other and is connected to an SMU ground.</p> |
