Methods for forming optical films

摘要

A method includes providing a layer having a plurality of spaced-apart lines of a first material extending along a first direction and forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous. After forming the lines of the second material, forming pairs of spaced-apart lines of a third material between adjacent pairs of the lines of the second material, wherein each line of the third material is spaced apart from the closest line of the second material and the first and third materials are different.

主权项

1. A method, comprising:
providing a layer comprising a plurality of spaced-apart lines of a first material extending along a first direction; forming a line of a second material on opposing surfaces of each line of the first material, the first and second materials being different and adjacent lines of the second material being discontinuous; after forming the lines of the second material, forming pairs of spaced-apart lines of a third material between and separated from adjacent pairs of the lines of the second material, adjacent lines of the third material being discontinuous and having a thickness that is different from a thickness of the lines of the first material, and forming a cap layer, the cap layer encapsulating the lines of the first, second and third materials wherein, after forming the cap layer, the lines of the third material have a thickness that is at most 95% of the thickness of the lines of the first material.