Multiple dimension position sensor

摘要

An apparatus including a controller, a workpiece transport in communication with the controller having a movable portion and a transport path, and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the transport path and in communication with the controller, the field generating platen is configured for position measurement and propelling the movable portion, each sensor in the at least one sensor group is configured to provide but one output signal along a single axis corresponding to a sensed field generated by the at least one field generating platen and the controller is configured calculate a multi-dimensional position of the movable portion based on the but one output signal of at least one of the sensors in the at least one sensor group, the multi-dimensional position including a planar position and a gap measurement.

主权项

1. An apparatus comprising:
a controller; a robotic actuator in communication with the controller having a movable portion and a path of actuator motion; and a multi-dimensional position measurement device including at least one field generating platen attached to the movable portion and at least one sensor group positioned along the path of actuator motion and in communication with the controller, where the field generating platen is configured for both position measurement and propelling the movable portion; wherein each sensor in the at least one sensor group is configured to provide but one output signal corresponding to variances along a single axis in a sensed field generated by the at least one field generating platen and the controller is configured to calculate a multi-dimensional position of the movable portion adjacent a respective one of the at least one sensor group based on the but one output signal of at least one of the sensors in the at least one sensor group, where the multi-dimensional position includes at least a planar position and a gap between the robotic actuator and the at least one sensor group.