Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element

摘要

In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.

主权项

1. A substrate cartridge adapted to accommodate a flexible strip-like sheet substrate for forming an electric circuit thereon, the substrate cartridge comprising:
a cartridge mainframe that has
an opening which extends in a widthwise direction of the substrate and through which the substrate is carried in/out in a striped direction of the substrate;a roller which is provided to be rotatable around a center axis along the widthwise direction and to wind up the substrate in the striped direction to accommodate the substrate in a roll shape; anda cap member which is movable provided to open or close the opening; a mount portion which is provided to the cartridge mainframe and is detachably connected to an external connecting portion of a processing apparatus of the substrate; and a switching mechanism which switches the cap member to an opened state when the mount portion is connected to the external connecting portion and switches the cap member to a closed state when the mount portion is detached from the external connecting portion.