| 发明名称 |
APPARATUS FOR COATING SOLUTION BASED ON HYBRID TYPE AND METHOD THEREOF |
| 摘要 |
The present invention relates to an apparatus and method for atomizing a solution and coating a substrate with the atomized solution. A particle is formed in a sub nano-scale by finally coating the substrate with the atomized solution by firstly atomizing the solution in an ESD method and secondly atomizing the solution by a surface acoustic wave unit. |
| 申请公布号 |
KR101429003(B1) |
申请公布日期 |
2014.08.12 |
| 申请号 |
KR20130036616 |
申请日期 |
2013.04.04 |
| 申请人 |
JEJU NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION |
发明人 |
CHOI, KYUNG HYUN;DANG, HYUN WOO;KIM, HYUNG CHAN;KO, JEONG BEOM |
| 分类号 |
B05B17/04;B05C5/00;B05D1/26 |
主分类号 |
B05B17/04 |
| 代理机构 |
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