发明名称 FUNCTIONAL ELEMENT AND MANUFACTURING METHOD OF SAME
摘要 Provided is a functional element which is obtained by forming a lamination film on a substrate and then dividing the substrate and the lamination film into a desired shape. The functional element has a hexagonal substrate, a lamination film formed on a C surface of the substrate, and a plurality of divided surfaces which are exposed by dividing the substrate into quadrilaterals. At least one line of division lines in the case of dividing the substrate into quadrilaterals is perpendicular to any one of equivalent directions of [1-100], [−1010], and [01-01] of the substrate from a [0001] direction of the substrate, and the divided surfaces formed by the division lines are inclined in a direction of other divided surfaces to which at least a part thereof is opposed.
申请公布号 KR101429837(B1) 申请公布日期 2014.08.12
申请号 KR20127018926 申请日期 2011.01.18
申请人 发明人
分类号 H01L21/301;H01L21/338;H01L29/778;H01L29/812 主分类号 H01L21/301
代理机构 代理人
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