VERTICALLY ALIGNED MESOPOROUS FILM, MANUFACTURING METHOD THEREOF, AND THEIR CATALYTIC APPLICATIONS

摘要

The present invention relates to a vertically aligned mesoporous silicate film position-selectively deposited with a metal from a single polymer precursor, and a strong catalytic application thereof. An innovative single precursor approach is reported for fabricating the vertically aligned mesoporous silicate thin film having high thermal and physical resistance on a large-scale Si wafer (2 x 3 cm^2). An organic-nonorganic block copolymer (polyethylene-ss-polyvinyl cyclic silazine: (BCP) PEO-ss-PVCSZ) having a disulfide bridge complicatedly designed and being chemically cleavable is newly composed as a single precursor for an oriented silicate nanopore film. A meso structure is directly formed on a substrate through a block division process connected to a solvent annealing self-assembly process and a simple hydrolysis conversion process from a polymer to a siliceous phase at room temperature.