发明名称 Bottom and top gate organic transistors with fluropolymer banked crystallization well
摘要 A method is provided for fabricating a printed organic thin film transistor (OTFT) with a patterned organic semiconductor using a fluropolymer banked crystallization well. In the case of a bottom gate OTFT, a substrate is provided and a gate electrode is formed overlying the substrate. A gate dielectric is formed overlying the gate electrode, and source (S) and drain (D) electrodes are formed overlying the gate dielectric. A gate dielectric OTFT channel interface region is formed between the S/D electrodes. A well with fluropolymer containment and crystallization banks is then formed, to define an organic semiconductor print area. The well is filled with an organic semiconductor, covering the S/D electrodes and the gate dielectric OTFT channel interface. Then, the organic semiconductor is crystallized. Predominant crystal grain nucleation originates from regions overlying the S/D electrodes. As a result, an organic semiconductor channel is formed, interposed between the S/D electrodes.
申请公布号 US8803139(B2) 申请公布日期 2014.08.12
申请号 US201313768708 申请日期 2013.02.15
申请人 Sharp Laboratories of America, Inc. 发明人 Puntambekar Kanan;Stecker Lisa;Ulmer Kurt
分类号 H01L29/08;H01L51/05 主分类号 H01L29/08
代理机构 Law office of Gerald Maliszewski 代理人 Law office of Gerald Maliszewski ;Maliszewski Gerald
主权项 1. A bottom gate organic thin film transistor (OTFT) with a fluropolymer banked crystallization well, the OTFT comprising: a substrate; a gate electrode overlying the substrate; gate dielectric overlying the gate electrode; source (S) and drain (D) electrodes overlying the gate dielectric, exposing a gate dielectric channel interface region between the S/D electrodes; a well with fluropolymer containment and crystallization banks forming a print area surrounding the gate dielectric channel interface; and, a crystallized organic semiconductor layer with a channel overlying the gate dielectric channel interface.
地址 Camas WA US