| 主权项 |
1. An apparatus for etching features in a layer over a wafer, comprising:
an etching chamber; a wafer support connected to the etching chamber for mounting the wafer within the etching chamber; a gas distribution system connected to the etching chamber, comprising:
an inner zone gas distribution system with a first gas supply line, wherein the inner zone gas distribution system includes three gas supply lines parallel to each other, wherein each of the three gas supply lines has a flow valve upstream of a fixed orifice, and wherein the fixed orifices are configured to have a different resistance compared to the respective neighboring segments of the respective flows; andan outer zone gas distribution system with a second gas supply line and a second fixed orifice, wherein the second fixed orifice is configured to have a resistance different from the resistance of the second gas supply line neighboring the second fixed orifice, wherein the outer zone gas distribution system surrounds the inner zone gas distribution system; a first gas source in fluid connection with the fixed orifices, wherein the first gas source provides a first component gas to each of the inner zone gas distribution system and the outer zone gas distribution system through the fixed orifices, respectively; a single tuning gas source in fluid connection with a first valve and a second valve, wherein the first valve is in fluid connection with the inner zone gas distribution system downstream of the fixed orifices and the second valve is in fluid connection with the outer zone gas distribution system downstream of the second fixed orifice, wherein the single tuning gas source provides a second component gas to each of the inner zone gas distribution system and the outer zone gas distribution system, wherein the second component gas is provided to the inner zone gas distribution system at a first flow rate greater than or equal to zero and to the outer zone gas distribution system at a second flow rate greater than or equal to zero, wherein the second flow rate is different than the first flow rate; a power source connected to the etching chamber, wherein the power source is capable of providing power to the etching chamber sufficient to create plasmas from the gasses entering the inner zone gas distribution system and the outer zone gas distribution system and cause an etching of a layer to be etched; and a control system connected to the gas source and power source, wherein the control system comprises non-transitory computer readable code for providing the first gas component and the second gas component such that the ratio of the first component gas to the second component gas in the inner zone gas distribution system is less than a ratio of the first component gas to the second component gas in the outer zone distribution system, and energizing the power source to simultaneously create a plasma from the first gas and a plasma from the second gas. |
