发明名称 |
Method and device for increasing fin device density for unaligned fins |
摘要 |
A method of generating a layout for a device includes receiving a first layout including a plurality of active regions, each active region of the plurality of active regions having sides. The method further includes defining a plurality of elongate mandrels that each extend in a first direction and are spaced apart from one another in a second direction perpendicular to the first direction. The method further includes for each adjacent pair of partially-parallel active regions of the plurality of active regions having a minimum distance less than a specified minimum spacing, connecting at least a portion of nearest ends of pairs of elongate mandrels, each mandrel of a pair from a different active region. The method further includes generating a second layout including a plurality of elongate mandrels in the plurality of active regions, and connective elements between active regions of at least one adjacent pair of active regions. |
申请公布号 |
US8806397(B2) |
申请公布日期 |
2014.08.12 |
申请号 |
US201314018133 |
申请日期 |
2013.09.04 |
申请人 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
发明人 |
Wang Chien-Hsun;Chang Chih-Sheng;Lin Yi-Tang;Shieh Ming-Feng |
分类号 |
G06F17/50 |
主分类号 |
G06F17/50 |
代理机构 |
Lowe Hauptman & Ham, LLP |
代理人 |
Lowe Hauptman & Ham, LLP |
主权项 |
1. A semiconductor manufacturing method of generating a layout for a device, comprising:
for each of a plurality of active regions of a first layout, defining a plurality of elongate mandrels that each extend in a first direction and are spaced apart from one another in a second direction perpendicular to the first direction, each active region of the plurality of active regions having sides; for each adjacent pair of partially-parallel active regions of the plurality of active regions having a minimum distance less than a specified minimum spacing, connecting at least a portion of nearest ends of pairs of elongate mandrels, each mandrel of a pair from a different active region of the adjacent pair of partially-parallel active regions; and, generating a second layout using a layout-generating machine, said second layout including the plurality of active regions, a plurality of elongate mandrels in the plurality of active regions, and connective elements between active regions of at least one adjacent pair of partially-parallel active regions. |
地址 |
TW |