Deposition method and method for manufacturing light-emitting device

摘要

An object is to provide a deposition method for smoothly obtaining desired pattern shapes of material layers and a method for manufacturing a light-emitting device while throughput is improved when a plurality of different material layers is stacked on a substrate. A material layer is selectively formed in advance in a position overlapped with a light absorption layer over a first substrate by pump feeding. Three kinds of light-emitting layers are deposited on one deposition substrate. This first substrate and a second substrate that is to be a deposition target substrate are arranged to face each other, and the light absorption layer is heated by being irradiated with light, whereby a film is deposited on the second substrate. Three kinds of light-emitting layers can be deposited with positional accuracy by performing only one position alignment before light irradiation.

主权项

1. A method for manufacturing a light-emitting device, comprising the steps of:
forming a light absorption layer on one surface of a first substrate; selectively forming a first partition over the light absorption layer; discharging a material liquid from a nozzle and forming a material layer in contact with the first partition and the light absorption layer; providing a second substrate having a first electrode and a second partition on one surface thereof so as to face the one surface of the second substrate and the one surface of the first substrate provided with the material layer; irradiating the light absorption layer with light from the other surface side of the first substrate and selectively heating at least a portion of the material layer overlapped with the light absorption layer, thereby forming a layer including an organic compound over the first electrode provided on the one surface of the second substrate; and forming a second electrode over the layer including the organic compound.