APPARATUS FOR TRANSFERRING A PROBE CARD AND METHOD OF TRANSFERRING A PROBE CARD

摘要

A device to transfer a probe card comprises: a driving stage; a plurality of plates arranged on the driving stage and formed to be moved in a straight direction in a multi-stage type; a card support unit arranged on a first plate positioned on the top of the plates and formed to support the probe card; a rotation driving unit each positioned on a plurality of plates between the first plate and the card support unit to rotate a plurality of plates; and the card support unit by rotating a plurality of straight driving units and a driving stage for each driving the card support unit and the plates in a straight direction.