APPARATUS AND METHOD FOR DETECTING DEFECT OF SEMICONDUCTOR DEVICE

摘要

The technical idea of the present invention provides an apparatus and method for detecting a defect in a semiconductor device, which can detect a defect in a semiconductor device in real time during a semiconductor process. The apparatus for detecting a defect in a semiconductor device comprises at least one sensor mounted on a semiconductor processing equipment to which a semiconductor device is physically connected, and detecting a signal which is generated in the semiconductor device with the semiconductor processing equipment as a medium; a signal converter to convert the detected signal into a digital signal via the sensor; and a signal analyzer for determining whether the semiconductor device is damaged or not by a predetermined rule by analyzing the digital signal from the signal converter.