| 摘要 |
A substrate transport apparatus is provided to improve the production efficiency of the overall substrate by horizontally moving the supporting roller and opening the fork ramp and to reduce the transfer of the substrate. The substrate transport apparatus comprises the conveying unit(20) and the variable roller unit(30). The conveying unit more includes the fork ramp(25) and a plurality of roller parts for the transfer of substrate. The variable roller unit operates in the horizontal direction to the conveying unit and opens the fork ramp. A plurality of roller parts includes the driving part, the axis of rotation, and the transferring roller. The variable roller unit more includes the supporting roller which is arranged in the fork ramp, and the drive unit for operating the supporting roller. |
