HIGH PERFORMANCE THERMOELECTRIC NANOWIRE HAVING CORE-SHELL STRUCTURE AND METHOD FOR FABRICATING THERMOELECTRIC NANODEVICE COMPRISING THE SAME

摘要

Provided are a thermoelectric nanowire having a core-shell structure with high thermoelectric performance, and a method of fabricating a thermoelectric nanodevice having the same. One aspect of the present invention provides a method of fabricating a thermoelectric nanodevice having a thermoelectric nanowire with a core-shell structure comprising the following steps. A thermoelectric nanowire, having a core-shell structure with a controlled diameter within a range of about 380-550nm and a thermoelectric performance index (ZT) greater than or equal to about 0.5, is stacked on a substrate. A copolymer layer is formed on the substrate to include the nanowire therein, and an electron beam resistor is formed on the copolymer layer. An electron beam lithography process is performed to etch a portion of the copolymer layer and an electron beam resist layer, such that at least a portion of a nanowire core is etched. After a surface oxide layer of an exposed nanowire is etched to be removed by using a plasma etching in a chamber, an ohmic contact is vaporized in-situ on the nanowire with the oxide layer removed. Then, the copolymer layer and an electron beam resistor layer are removed from the nanowire to form an electrode.