| 摘要 |
A substrate loading apparatus for vertically loading substrates is provided to easily unload a specific substrate, and maximizing space use efficiency. A substrate loading part(10) has a plurality of slots(30) which vertically loads substrates in the state inclining to the constant angle while being arranged in the loading frame(20). A plurality of substrate transfer rollers(31) are placed at the bottom side of each slot. A horizontally moving unit is placed at a driving frame(60) and moves the loaded frame horizontally. A driving unit is moved by the horizontally moving unit, and unloads a specific substrate. |
