发明名称 WIRESAW CUTTING METHOD
摘要 <p>The present invention provides a wiresaw cutting method comprising cutting a workpiece with a wiresaw while applying an aqueous cutting fluid to the wiresaw from a recirculating reservoir of cutting fluid, monitoring at least one of a chemical property, a physical property, or both, and adjusting the chemical composition of the cutting fluid while cutting the workpiece to maintain the property being monitored. The present invention additionally provides an apparatus to perform the inventive method.</p>
申请公布号 KR101428152(B1) 申请公布日期 2014.08.08
申请号 KR20117016868 申请日期 2009.12.21
申请人 发明人
分类号 H01L21/301;H01L31/04;H01L31/18 主分类号 H01L21/301
代理机构 代理人
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