| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing device capable of highly accurately processing at a high speed, without receiving influence of a quadrant projection.SOLUTION: A laser processing device comprises: a table (2b) for placing a workpiece (W); a processing head (10) for irradiating a laser beam (L1) to the workpiece (W); a head unit (20) for supporting the processing head (10); a first moving part (2c) for moving the head unit (20) in a first axis (X) direction along the table (2b); a second moving part (2d) for moving the head unit (20) in a second axis (Y) direction along the table (2b) by crossing with the first axis (X) direction; a rotor (22b) rotatably supported around a third axis (CL1) orthogonal to the first axis (X) direction and the second axis (Y) direction by the head unit (20); and a linear motion unit (23) supported so as to be capable of linear motion at a moving distance (DL) smaller than an outer diameter of the rotor (22b) in one diameter direction of the rotor (22b) on the inside of the rotor (22b) and supporting the processing head (10) so that the laser beam (L1) is irradiated on a four axis (CL3) parallel to the third axis (CL1). |
