| 摘要 |
<p>In order to make it possible to use a simple configuration to detect defects in a quick and highly sensitive manner on a sheet-shaped sample that is continuously conveyed at high speed and that is likely to exhibit a relatively large amount of positional variation in the height direction thereof, this inspection device is configured to: change the delay amount of a pulse laser according to wavelength; spatially expand, according to wavelength, the pulse laser for which the delay amount has been changed according to wavelength; irradiate a sample from a first direction with the pulse laser that has been spatially expanded according to wavelength; collect light that scatters in a direction that differs from the first direction from among scattered light from the sample that is irradiated with the pulse laser; photoelectrically convert the collected scattered light; process a detection signal for each occurrence of photoelectrically converted scattered light for which the delay amount has been changed according to wavelength; and extract defect information.</p> |
