发明名称 |
LIGHT-SENSITIVE RESIN COMPOSITION AND PATTERN FORMING METHOD USING SAME |
摘要 |
<p>Provided is a light-sensitive resin composition. A light-sensitive resin composition according to one embodiment of the present invention can form an organic insulating film able to simultaneously satisfy properties such as resolution and adhesive strength by using an oxime-based photoinitiator, a polyfunctional monomer, a melamine crosslinking agent and a silane coupling agent.</p> |
申请公布号 |
WO2014119849(A1) |
申请公布日期 |
2014.08.07 |
申请号 |
WO2013KR12190 |
申请日期 |
2013.12.26 |
申请人 |
DONGJIN SEMICHEM CO., LTD. |
发明人 |
YOUN, HYOC-MIN;PARK, JEONG MIN;KIM, JI-HYUN;LEE, JUNG-SOO |
分类号 |
G03F7/004;G03F7/028;G03F7/26;H01L21/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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