| 摘要 |
A quaternary alloy sputtering target made of copper (Cu), indium (In), gallium (Ga) and selenium (Se), wherein the Cu-In-Ga-Se sputtering target has a composition that is represented by a composition formula of CuIn 1-x Ga x Se 2-y (provided that x and y respectively represent atomic ratios), a composition range of 0 < x ‰¤ 0.5, 0 ‰¤ y ‰¤ 0.04, and a relative density of 90% or higher. Specifically, a CIGS quaternary alloy sputtering target of high density and low oxygen concentration, and a CIGS quaternary alloy sputtering target comprising the intended bulk resistance. |
