DRAWING DEVICE AND DRAWING METHOD

摘要

PROBLEM TO BE SOLVED: To draw a pattern described with design data to a local area which is formed on the surface of a substrate for a short time.SOLUTION: The drawing device includes: imaging means having a first imaging section which images a whole image WI of the surface of a substrate W; image processing means which performs image processing of the whole image WI which is imaged by the first imaging section to acquire arrangement information indicating an arrangement of a local area CP; data creation means which corrects the design data on the basis of the arrangement information to create correction design data; transportation means which transports the substrate W to which imaging of the whole image WI is completed by the first imaging section from the imaging means to a processing stage; and exposure means which exposes a pattern onto the local area CP on the basis of the correction design data, after moving the processing stage and aligning the local area CP formed on the surface of the substrate W on the processing stage with the pattern described with the correction design data.