MAGNETIC SENSOR INTEGRATED IN A CHIP FOR DETECTING MAGNETIC FIELDS PERPENDICULAR TO THE CHIP AND MANUFACTURING PROCESS THEREOF

摘要

An integrated magnetic sensor formed by a semiconductor chip having a surface and accommodating a magnetic via and a sensing coil. The magnetic via is formed by a cylindrical layer of ferromagnetic material that extends perpendicular to the surface of the first chip and has in cross-section an annular shape of a circular or elliptical or curvilinear type. The sensing coil surrounds the magnetic via at a distance and is connected to an electronic circuit.

主权项

1. An integrated magnetic sensor comprising:
a first chip having a first surface; a magnetic via located in the first chip, the magnetic via including a cylindrical layer of ferromagnetic material that extends to the first surface of the first chip and has, in cross-section, an annular shape; and a sensing coil located in the first chip and surrounding the magnetic via at a distance.