发明名称 MEASUREMENT OBJECT INFORMATION ACQUISITION DEVICE AND MEASUREMENT OBJECT INFORMATION ACQUISITION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a measurement object information acquisition device or the like by which the focus position of an electromagnetic wave pulse with respect to the position of a measurement object can be adjusted in such a state that the fluctuations of an atmosphere in a housing are suppressed and the physical property or structure of the measurement object can be accurately and easily observed.SOLUTION: A device acquiring information on the physical property or structure of a measurement object 108 by the electromagnetic wave pulse includes a generation part 101 generating the electromagnetic wave pulse with which the measurement object is irradiated, a detection part 102 detecting the electromagnetic wave pulse from the measurement object, a housing 106 including at least a part of the propagation path of the electromagnetic wave pulse reaching the detection part from the generation part, and a measurement window part 107 changing the propagation distance of the electromagnetic wave pulse by moving a measurement window arranged in a part of the housing as well. The measurement object is arranged on the side opposite to the propagation path of the electromagnetic wave pulse in the housing across the measurement window part.
申请公布号 JP2014142309(A) 申请公布日期 2014.08.07
申请号 JP20130012174 申请日期 2013.01.25
申请人 CANON INC 发明人 ITSUJI TAKEAKI
分类号 G01N21/35 主分类号 G01N21/35
代理机构 代理人
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