PLASMA-RESISTANT COMPONENT

摘要

PROBLEM TO BE SOLVED: To provide a plasma-resistant component which allows the adhesion strength or the adhesion force of a coating film covering the inner wall of a chamber to be enhanced or allows for reduction of particles.SOLUTION: The plasma-resistant component includes a substrate and a plasma-resistant layer structure including yttria polycrystal formed on the surface of the substrate. The layer structure includes: a first uneven structure; and a second uneven structure formed to overlap the first uneven structure, and having finer irregularities as those of the first uneven structure.