| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for avoiding damage or transfer error of a substrate, when carrying out a substrate from a transfer container for carrying a substrate, while housing, into a substrate processing apparatus.SOLUTION: A substrate transfer apparatus where a substrate take-out port in the front surface of a container body is closed airtightly by a lid, and a substrate is taken out from a transfer container for transferring a plurality of substrates while housing like a shelf, is configured to include a load port for carrying in the transfer container, a detector being carried into the load port and detecting the housing situation of the substrates in the container body from which the lid is removed, a substrate transfer mechanism entering into the container body the housing situation of which is detected and taking out a substrate, and a correction mechanism for correcting the housing situation of substrates in the container body, before a substrate is taken out from the container body by means of the substrate transfer mechanism. |
