发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device or the like having a high aperture ratio and including a capacitor capable of increasing capacitance.SOLUTION: A semiconductor device includes: a transistor including a gate insulating film, an oxide semiconductor film, a gate electrode partly overlapping with the oxide semiconductor film, and a pair of electrodes in contact with the oxide semiconductor film; a capacitor including a first light-transmitting conductive film over the gate insulating film, a dielectric film over the first light-transmitting conductive film, and a second light-transmitting conductive film over the dielectric film; an oxide insulating film over the pair of electrodes of the transistor; and a nitride insulating film over the oxide insulating film. The dielectric film is the nitride insulating film, the oxide insulating film has a first opening over one of the pair of electrodes, and the first light-transmitting conductive film, respectively, the nitride insulating film has a second opening over the one of the pair of electrodes, and the second opening is on an inner side than the first opening.
申请公布号 JP2014142617(A) 申请公布日期 2014.08.07
申请号 JP20130263354 申请日期 2013.12.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;MIYAKE HIROYUKI;SHISHIDO HIDEAKI;KATAYAMA MASAHIRO;OKAZAKI KENICHI
分类号 G09F9/30;G02F1/1368;H01L21/336;H01L29/786 主分类号 G09F9/30
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