发明名称 |
Multi-Axis Tilt Sensor for Correcting Gravitational Effects on the Measurement of Pressure by a Capacitance Diaphragm Gauge |
摘要 |
A system and method compensate for effects of gravity on the diaphragm of a capacitance diaphragm gauge (CDG). The CDG generates a measured absolute pressure value in response to an applied absolute pressure on an input of the CDG. The CDG is subjected to a variable orientation of the CDG with respect to the earth's surface that can cause inaccurate pressure measurements. A pressure measuring circuit generates a measured value of an applied absolute pressure provided to an input of the CDG. A tilt sensor generates at least one tilt sensor output value that is responsive to an orientation of the CDG with respect to the earth's surface. A processing system adjusts the measured absolute pressure value by a calibration factor to generate a calibrated absolute pressure value representing the applied absolute pressure, wherein the calibration factor is selected in response to the at least one tilt sensor output value. |
申请公布号 |
US2014222363(A1) |
申请公布日期 |
2014.08.07 |
申请号 |
US201414155321 |
申请日期 |
2014.01.14 |
申请人 |
Reno Sub-Systems Canada, Incorporated |
发明人 |
Ferran David J.;Ferran Robert J. |
分类号 |
G01L27/00;G01L9/00 |
主分类号 |
G01L27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Bedford CA |