OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS

摘要

An optical filter device has a light interference filter and a casing. The light interference filter has a fixed substrate, a movable substrate joined to the fixed substrate, a fixed reflection film provided on the fixed substrate, and a movable reflection film provided on the movable substrate. The casing has a base substrate and a lid that forms an internal space with the base substrate. The movable substrate has a holding portion provided on a surface opposite to the fixed substrate, outside a light interference region, as viewed in a plan view. The base substrate has a light transmission hole corresponding to a light transmission region. An outer peripheral edge of the light transmission hole faces the holding portion. The surface opposite to the fixed substrate of the movable substrate is joined to the base substrate.

主权项

1. An optical filter device comprising:
a light interference filter having a first substrate, a second substrate facing the first substrate, a first reflection film provided on the first substrate, and a second reflection film provided on the second substrate and facing the first reflection film; and a casing having a base substrate that fixes the light interference filter, and a lid that is joined to the base substrate and forms an internal space capable of housing the light interference filter between the base substrate and the lid; wherein the second substrate has an annular recessed portion provided on a surface opposite to the first substrate, outside a light interference region where the first reflection film and the second reflection film overlap with each other, as viewed in a plan view of the first substrate and the second substrate seen from a direction of substrate thickness, the base substrate has a light transmission hole corresponding to a light transmission region, an outer peripheral edge of the light transmission hole faces the annular recessed portion, and the surface opposite to the first substrate of the second substrate is joined to the base substrate.