SENSOR WITH AN EMBEDDED THERMISTOR FOR PRECISE LOCAL TEMPERATURE MEASUREMENT
摘要
A resistive temperature sensor (thermistor) for a microelectromechanical system (MEMS) device provides local temperatures of MEMS sensors and other MEMS devices for temperature compensation. Local accurate temperatures of the sensors and other devices provide for temperature compensation of such sensors or devices. By incorporating the thermistor structure into a MEMS device, an accurate temperature is sensed and measured adjacent to or within the structural layers of the device. In one embodiment, the thermistor is located within a few micrometers of the primary device.
申请公布号
WO2014093304(A3)
申请公布日期
2014.08.07
申请号
WO2013US74051
申请日期
2013.12.10
申请人
ROBERT BOSCH GMBH;GRAHAM, ANDREW;FEYH, ANDO;O'BRIEN, GARY