| 发明名称 |
ELECTRONIC FUSE HAVING A DAMAGED REGION |
| 摘要 |
An electronic fuse structure including an Mx level comprising an Mx metal, and an Mx+1 level above the Mx level, the Mx+1 level including an Mx+1 metal and a via electrically connecting the Mx metal to the Mx+1 metal in a vertical orientation, where the Mx+1 metal comprises a thick portion and a thin portion, and where the Mx metal, the Mx+1 metal, and the via are substantially filled with a conductive material. |
| 申请公布号 |
US2014217612(A1) |
申请公布日期 |
2014.08.07 |
| 申请号 |
US201313760488 |
申请日期 |
2013.02.06 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
Bao Junjing;Bonilla Griselda;Choi Samuel S.;Filippi Ronald G.;Li Wai-Kin;Kaltalioglu Erdem;Lustig Naftali E.;Simon Andrew H.;Wang Ping-Chuan;Zhang Lijuan |
| 分类号 |
H01L23/525 |
主分类号 |
H01L23/525 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electronic fuse structure, the structure comprising:
an Mx level comprising an Mx metal; and an Mx+1 level above the Mx level, the Mx+1 level comprising an Mx+1 metal and a via electrically connecting the Mx metal to the Mx+1 metal in a vertical orientation, wherein the Mx+1 metal comprises a thick portion and a thin portion, and wherein the Mx metal, the Mx+1 metal, and the via are substantially filled with a conductive material. |
| 地址 |
Armonk NY US |
