| 发明名称 |
CYCLOHEXASILANE AND METHOD FOR PRODUCING THE SAME |
| 摘要 |
High purity cyclohexasilane and a method for increasing the purification efficiency thereto are provided. The method for producing cyclohexasilane of the present invention is characterized in that, in distilling crude cyclohexasilane to obtain purified cyclohexasilane, the absolute pressure during distillation is set to 2 kPa or less, and the heating temperature of crude cyclohexasilane is set to 25 to 100° C. The cyclohexasilane of the present invention contains pure cyclohexasilane at a rate of 98% by mass or more and 100% by mass or less. |
| 申请公布号 |
US2014219893(A1) |
申请公布日期 |
2014.08.07 |
| 申请号 |
US201314138764 |
申请日期 |
2013.12.23 |
| 申请人 |
Nippon Shokubai Co., Ltd. |
发明人 |
IMOTO Shin-ya;ABE Takashi;KITAMURA Morihiro;TAKAHASHI Hikaru;MORITA Takehiko;AKIYAMA Tatsuhiko |
| 分类号 |
C01B33/04;B01D53/86;B65B3/04;B01D53/46 |
主分类号 |
C01B33/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Cyclohexasilane comprising pure cyclohexasilane at a rate of 98% by mass or more and 100% by mass or less. |
| 地址 |
Osaka JP |
