| 摘要 |
PURPOSE: An apparatus for transfer a substrate is provided to prevent an error in transferring a substrate due to the deflection of the substrate in molding process by installing a guide unit for pressing the top of the substrate. CONSTITUTION: A pair of guide rails(110) supports both parts of the substrate which completes a molding progress and guides the movement of the substrate. A guide unit(120) pressures the both pars supported by the guide rails and suppress the deflection of the substrate or makes the substrate planarized. A pressure unit has a portion toward the substrate to press a part of the substrate downwardly. A frame is arranged in the lower part of the guide rails and supports the pressure unit. |
