MEASURING METHOD AND MEASURING SYSTEM, EXPOSURE METHOD AND EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To determine the shrinkage of a lattice part in a short time.SOLUTION: On the basis of the simultaneous detection results of different regions of an X scale 39Xobtained using alignment systems AL1, AL2-AL2for detecting the X scale 39Xprovided on a wafer stage WS and having the X axis direction as a periodic direction, and the existing clearances of the alignment system AL1 and the alignment systems AL2-AL2, first interval in the X axis direction between specific lattices of the X scale 39Xis determined. Consequently, the first interval in the periodic direction between specific lattices of the lattice part can be determined in a short time, and thereby the shrinkage of the lattice part can be determined.