发明名称 COMPACT TYPE DECOMPRESSION DEVICE
摘要 <p>The present invention relates to a compact type decompression device, which is capable of reducing pressure at the exhaust side of a vacuum pump by using an ejector effect caused by the flow of conveyed gas without the need of any additional power, thereby remarkably reducing the load and power consumption during the idling operation of the vacuum pump. In addition, the device is simply inserted without having to cut an exhaust pipe if a narrow gap of about 10 mm is secured between the vacuum pump and the exhaust pipe.</p>
申请公布号 WO2014119819(A1) 申请公布日期 2014.08.07
申请号 WO2013KR03000 申请日期 2013.04.10
申请人 U.N.I INC;B.S.A INC 发明人 CHO, OUNGMAN
分类号 H01L21/02;H01L21/68 主分类号 H01L21/02
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