| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing device which can suppress debris caused by radiation of a laser beam from being stuck to an objective lens or a driving shaft.SOLUTION: A laser processing device comprises: a chuck table 30 which holds a workpiece on a buildup area; laser beam radiation means 10 which irradiates the workpiece held on the chuck table 30 with laser beam L to process the workpiece; enclosing means 40 which is erected in a direction perpendicular to the buildup area and surrounds the chuck table 30; and exhaust means 50 which exhausts atmosphere in the region A segmented by the enclosing means 40. The enclosing means 40 comprises positioning means which can advance and retreat between an action position where the segmented region A is formed on the buildup area and a retreat position where the workpiece is attached or detached to the chuck table 30. |
