| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for producing a carbon nanotube assembly, which is a method for producing a carbon nanotube assembly including a plurality of carbon nanotubes on a surface of a substrate and having extremely high adhesive force between the substrate and the carbon nanotubes.SOLUTION: A method for producing a carbon nanotube assembly is a method for producing a carbon nanotube assembly including a plurality of carbon nanotubes on a surface of a silicon substrate, in which an AlOfilm is formed by depositing an Al film on the surface of the silicon substrate and subsequently heating the deposited Al film in air at a temperature of 700°C or higher. A catalyst layer is formed on the AlOfilm, and carbon nanotubes are grown on the catalyst layer.</p> |
