发明名称 POLISHING DEVICE
摘要 An embodiment of the present invention includes a rotation table having a rotating axis vertical to gravity; a polishing vessel provided on one side of the rotation table and having a rotating axis vertical to gravity in which a ceramic body and a polishing medium are input into the polishing vessel; a polishing vessel rotation control unit to control a rotation of the polishing vessel; and a rotation table control unit to control a rotation of the rotation table, wherein the rotating axis of the polishing vessel and the rotating axis of the rotation table are in parallel while being located in different positions.
申请公布号 KR20140098031(A) 申请公布日期 2014.08.07
申请号 KR20140076541 申请日期 2014.06.23
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 OH, DEOK SOK;CHAE, EUN HYUK;JEON, JUNG HYUM;JUNG, JIN MAN
分类号 B24B31/02;B24B31/033 主分类号 B24B31/02
代理机构 代理人
主权项
地址