CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for measuring the surface potential of a sample using a charged particle beam, by measuring the potential of a sample induced by irradiation with a charged particle beam, or detecting the compensation value of variation in the device conditions which change by charging of a sample.SOLUTION: While irradiating a sample with a charged particle beam, the charged particle beam emitted from the sample is deflected by a charged particle deflector, and the information about the sample potential is detected by using a signal obtained at that time.