发明名称 |
Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma |
摘要 |
A plasma generator according to an embodiment of the present invention is provided to generate a high density and stable plasma at near atmospheric pressure by preventing a transition of plasma to arc. The plasma generator includes a plate-shaped lower electrode for seating a substrate; and a cylindrical rotating electrode on the plate-shaped lower electrode, wherein the cylindrical rotating electrode includes an electrically conductive body that is connected to a power supply and includes a plurality of capillary units on an outer circumferential surface of the electrically conductive body; and an insulation shield layer that is made of an insulation material or a dielectric material, exposes a lower surface of the plurality of capillary units, and shields other parts. |
申请公布号 |
US2014217881(A1) |
申请公布日期 |
2014.08.07 |
申请号 |
US201214241223 |
申请日期 |
2012.08.10 |
申请人 |
Nam Kee-Seok;Kwon Jung-Dae;Jeong Yong Soo;Lee Gun Hwan;Yoon Jung Heum;Lee Sung Hun;Kim Dong Ho;Kang Jae Wook;Park Sung Gyu;Kim Chang Su |
发明人 |
Nam Kee-Seok;Kwon Jung-Dae;Jeong Yong Soo;Lee Gun Hwan;Yoon Jung Heum;Lee Sung Hun;Kim Dong Ho;Kang Jae Wook;Park Sung Gyu;Kim Chang Su |
分类号 |
H01J37/32;H01J9/02 |
主分类号 |
H01J37/32 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
Gyeongsangnam-do KR |