发明名称 |
Device for generating extreme UV (EUV) radiation/soft X-ray radiation, has electron beam source that is arranged in such a manner so that electron beam is stroked to discharge plasma to generate portion of EUV and/or X-ray radiation |
摘要 |
<p>The generating device has two opposing electrodes between a gas discharge is ignited by applying an electric voltage of a high voltage source (5) to generate a discharge plasma (6). An electron beam source is separated from the discharge plasma and arranged in such a manner so that the electron beam (10) generated by the electron beam source is stroked to the discharge plasma for generating a portion the EUV and/or X-ray radiation. An independent claim is included for a method for generating EUV radiation and/or soft X-ray radiation.</p> |
申请公布号 |
DE102013001940(A1) |
申请公布日期 |
2014.08.07 |
申请号 |
DE20131001940 |
申请日期 |
2013.02.05 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
BERGMANN, KLAUS |
分类号 |
H05G2/00 |
主分类号 |
H05G2/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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